Title :
LIGA process: sensor construction techniques via X-ray lithography
Author :
Ehrfeld, W. ; Gotz, F. ; Munchmeyer, D. ; Schelb, W. ; Schmidt, D.
Author_Institution :
Kernforschungszentrum Karlsruhe GmbH, West Germany
Abstract :
The LIGA (from the German Lithographie, Galvanoformung, Abformung) method, based on deep-etch X-ray lithography, electroforming and molding processes, is described. This microfabrication technique makes it possible to generate devices with minimal lateral dimensions in the micrometer range and structural heights of several hundred micrometers from metallic and plastic materials. In contrast to orientation-dependent etching of monocrystalline silicon, there are no restrictions on the cross-sectional shape of the microstructures. Various concepts of sensors for measuring vibration, acceleration, position, spectral distribution, radiation, composition of mixtures, etc. are presented.<>
Keywords :
X-ray lithography; acceleration measurement; chemical variables measurement; electric sensing devices; electroforming; integrated circuit technology; position measurement; vibration measurement; LIGA process; acceleration; composition; deep-etch X-ray lithography; detectors; electroforming; measurement; metallic materials; microfabrication; micrometer; microstructures; molding; plastic materials; position; radiation; sensors; spectral distribution; vibration; Accelerometers; Etching; Inorganic materials; Microstructure; Plastics; Position measurement; Shape; Silicon; Vibration measurement; X-ray lithography;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1988.26418
