Title :
Study of optimized deposition of thin film in DC magnetron sputtering and measuring the surface conductivity by four point probe and Hall effect
Author :
Mahmoudzadeh, Mahdi ; Bahadori, F. ; Ghoranneviss, Mahmood
Author_Institution :
Plasma Phys. Res. Lab., Tehran, Iran
Abstract :
Summary form only given. In our investigation thin films of copper and brass were prepared by DC magnetron sputtering and coated on flat glasses. The effect of the thickness of brass and copper on electrical and optical properties was studied. The result shows that the resistively of thin films is a function of applied voltage. Furthermore it shows that the decrease in resistively with increased thickness is due to an increase in carrier concentration with increased film thickness.
Keywords :
Hall effect; brass; carrier density; copper; electrical resistivity; metallic thin films; sputter deposition; sputtered coatings; surface conductivity; Cu; CuZn; DC magnetron sputtering; Hall effect; brass; carrier concentration; copper; electrical properties; flat glass; four point probe; optical properties; surface conductivity; thin film deposition; Conductivity measurement; Copper; Glass; Hall effect; Optical films; Physics; Plasma measurements; Plasma properties; Probes; Sputtering;
Conference_Titel :
Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. The 31st IEEE International Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-8334-6
DOI :
10.1109/PLASMA.2004.1339979