DocumentCode :
3507016
Title :
Studies of a few monolayers of Cu/Brass on glass surfaces using AFM and TEM
Author :
Bahadori, F. ; Ghoranneviss, M. ; Mahmoudzadeh, M.
Author_Institution :
Plasma Phys. Res. Lab., Tehran, Iran
fYear :
2004
fDate :
1-1 July 2004
Firstpage :
303
Abstract :
Summary form only given. In this paper, a thick metal film (/spl sim/10 nm-1000 nm) is deposited at DC sputtering magnetron sets and the Copper film is formed by annealing at an elevated temperature. Studied of this solid-phase reaction have revealed the crucial role of material transport in the film but the underlying diffusion mechanisms still remained poorly understood. For ultra-thin Copper films deposited on Brass, the mechanisms governing this solid-phase reaction will likely to be different. In the present study, the initial stages of Cu growth on Brass and substrate were investigated. At high temperature, a complete reaction can be achieved giving rise to a perfect Cu/Brass grown film. Improvement of this upon annealing is characterized by an appreciable decrease of their full width at half maximum.
Keywords :
annealing; atomic force microscopy; brass; copper; diffusion; metallic thin films; monolayers; sputter deposition; transmission electron microscopy; 10 to 1000 nm; AFM; Cu growth; Cu-CuZn; Cu-brass monolayers; TEM; annealing; copper film; dc magnetron sputtering; diffusion mechanism; glass surfaces; material transport; solid-phase reaction; thick metal film; Annealing; Atomic force microscopy; Copper; Glass; Physics; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma temperature; Surface reconstruction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. The 31st IEEE International Conference on
Conference_Location :
Baltimore, MD, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-8334-6
Type :
conf
DOI :
10.1109/PLASMA.2004.1339980
Filename :
1339980
Link To Document :
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