Application of a microwave-driven plasma torch to thermal chemistry

Summary form only given. Physical Sciences Inc. has developed a Microwave-Driven Plasma Torch (MIDJet) and has used it for several thermal chemistries. Torches from 1 kW to 30 kW have been realized using both 2450 MHz and 915 MHz microwave sources. The MIDJet operates near atmospheric pressure, and thus the plasma density is much lower than the neutral density. Comparisons of results to calculations of chemical rates indicate that the reactions are largely at equilibrium. Current applications include the production of atomic fluorine, the dissociation of H/sub 2/S, the production of atomic oxygen for high rate photoresist stripping and atomic nitrogen for the growth of gallium nitride films. Details of experiments performed on these processes are discussed.