• DocumentCode
    3507211
  • Title

    Effect of Ni-W alloy barrier layer on copper pillar/Sn IMCs evolution

  • Author

    Chao Li ; Anmin Hu ; Ming Li ; Jiangyan Sun

  • Author_Institution
    Sch. of Mater. Sci. & Eng., Shanghai Jiao Tong Univ., Shanghai, China
  • fYear
    2012
  • fDate
    13-16 Aug. 2012
  • Firstpage
    1294
  • Lastpage
    1296
  • Abstract
    In this paper, the effect of Ni-W alloy barrier layer on copper pillar/Sn IMCs evolution has been investigated. Additive W weight content of Ni-W alloy ranged from 16 to 18 at. %. Controlled thickness of barrier layer was prepared on Cu substrate. Then, excessive matte Sn electroplated on as-deposited Ni-W layer. Ni-W had compact microstructure in state of FCC solid solution, which means it had good diffusion buffering potential for copper pillar consisting of Cu/Ni-W/Sn Summarized from BSE pictures of samples done by High Temperature Storage, it can be observed that no Sn atoms can be found in Cu Phase during the whole of High Temperature Storage while “bright” layer appeared and grew linearly over time. Besides, Cu atoms permeated throughout the entire Ni3Sn4 IMC layer with storage time prolonged from 72h to 132h.
  • Keywords
    copper alloys; crystal microstructure; diffusion; electrodeposits; electroplating; nickel alloys; solid solutions; tin alloys; tungsten alloys; BSE pictures; Cu; FCC solid solution; NiW; alloy barrier layer effect; bright layer; copper pillar-tin IMC evolution; electroplating; high temperature storage; time 72 h to 132 h; Aging; Atomic layer deposition; Bonding; Copper; Temperature distribution; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Packaging Technology and High Density Packaging (ICEPT-HDP), 2012 13th International Conference on
  • Conference_Location
    Guilin
  • Print_ISBN
    978-1-4673-1682-8
  • Electronic_ISBN
    978-1-4673-1680-4
  • Type

    conf

  • DOI
    10.1109/ICEPT-HDP.2012.6474843
  • Filename
    6474843