DocumentCode
3507211
Title
Effect of Ni-W alloy barrier layer on copper pillar/Sn IMCs evolution
Author
Chao Li ; Anmin Hu ; Ming Li ; Jiangyan Sun
Author_Institution
Sch. of Mater. Sci. & Eng., Shanghai Jiao Tong Univ., Shanghai, China
fYear
2012
fDate
13-16 Aug. 2012
Firstpage
1294
Lastpage
1296
Abstract
In this paper, the effect of Ni-W alloy barrier layer on copper pillar/Sn IMCs evolution has been investigated. Additive W weight content of Ni-W alloy ranged from 16 to 18 at. %. Controlled thickness of barrier layer was prepared on Cu substrate. Then, excessive matte Sn electroplated on as-deposited Ni-W layer. Ni-W had compact microstructure in state of FCC solid solution, which means it had good diffusion buffering potential for copper pillar consisting of Cu/Ni-W/Sn Summarized from BSE pictures of samples done by High Temperature Storage, it can be observed that no Sn atoms can be found in Cu Phase during the whole of High Temperature Storage while “bright” layer appeared and grew linearly over time. Besides, Cu atoms permeated throughout the entire Ni3Sn4 IMC layer with storage time prolonged from 72h to 132h.
Keywords
copper alloys; crystal microstructure; diffusion; electrodeposits; electroplating; nickel alloys; solid solutions; tin alloys; tungsten alloys; BSE pictures; Cu; FCC solid solution; NiW; alloy barrier layer effect; bright layer; copper pillar-tin IMC evolution; electroplating; high temperature storage; time 72 h to 132 h; Aging; Atomic layer deposition; Bonding; Copper; Temperature distribution; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Packaging Technology and High Density Packaging (ICEPT-HDP), 2012 13th International Conference on
Conference_Location
Guilin
Print_ISBN
978-1-4673-1682-8
Electronic_ISBN
978-1-4673-1680-4
Type
conf
DOI
10.1109/ICEPT-HDP.2012.6474843
Filename
6474843
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