Fast analysis of SAW propagation under multi-electrode-type gratings with finite thickness

Author

Hashimoto, Ken-Ya ; Zheng, Guo Qiang ; Yamaguchi, Masatsune

Author_Institution

Dept. of Electr. & Electron. Eng., Chiba Univ., Japan

Volume

1

fYear

1997

fDate

5-8 Oct 1997

Firstpage

279

Abstract

The paper proposes the method for the fast and accurate analysis of SAW propagation under metallic gratings consisting of multiple electrodes having unequal width, pitch and/or thickness: the grating structure is promising for developing single-phase unidirectional transducers (SPUDTs) with controlled passband shapes. The finite element method (FEM) is applied to the electroded region to take account of the effect of electrode thickness (mass-loading effect), and spectral domain analysis (SDA) to the substrate region for rapid computation. Electrical properties of the grating are determined by applying Aoki´s theory to the results of FEM and SDA at the boundary. Two kinds of typical metallic gratings were analysed, and the unidirectionality was discussed for SPUDTs employing these grating structures

Keywords

finite element analysis; spectral-domain analysis; surface acoustic wave transducers; ultrasonic propagation; Aoki theory; SAW propagation; controlled passband shapes; electrical properties; electroded region; fast analysis; finite element method; finite thickness; grating structure; mass-loading effect; metallic gratings; multi-electrode-type gratings; multiple electrodes; single-phase unidirectional transducers; spectral domain analysis; unidirectionality; Acoustic devices; Electrodes; Fingers; Gratings; Performance analysis; Periodic structures; Shape control; Spectral analysis; Surface acoustic waves; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.663024

Filename

663024