Title :
Nonplanar silicon strain sensors
Author :
Bower, R.W. ; Spencer, R.R. ; Lee, D.D.
Author_Institution :
California Univ., Davis, CA, USA
Abstract :
Variations of conventional thin-membrane strain sensors are described which use a series of anisotropic etches on
Keywords :
electric sensing devices; elemental semiconductors; pressure transducers; silicon; strain measurement; Si; V-grooves; fabrication; nonplanar strain sensor; pressure-sensor diaphragm; series of anisotropic etches; strain characteristics; Anisotropic magnetoresistance; Biomembranes; Capacitive sensors; Etching; Fabrication; MOS devices; MOSFETs; Piezoresistance; Sensor phenomena and characterization; Silicon;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1988.26428
