Title :
Effects of high temperature ion implantation on titanium nitride coated carbide cutting tools
Author :
Tang, D.L. ; Shen, L.R. ; Pu, S.H. ; Yan, F.X. ; Chen, Q.C. ; Chu, Paul K.
Author_Institution :
Southwestern Inst. of Phys., Chengdu, China
Abstract :
Summary form only given. The effects of high temperature nitrogen and aluminum ion implantation and plasma implantation on titanium nitride coated carbide cutting tools are investigated. Aluminum implantation is used to enhance the high temperature oxidation wear resistance, and plasma nitriding and high-temperature ion implantation are used to further improve the surface microhardness and corrosion resistance. TiN films are deposited on carbide cutting tools by vacuum arc ion plating, in which a shutter plate is used to avoid line of sight transit of macro-particles from the cathode to the substrate. Nitrogen and aluminum ion implantation at elevated temperature (300-600/spl deg/C) is then achieved in a multi-function ion implantation system. The effects of different substrate temperature, implantation dose and implantation energy on the surface properties are assessed. The corrosion measurements are carried out in a NaCl solution using electrochemical impedance spectroscopy. The oxidation resistance studies are carried out in air at 800/spl deg/C using continues and discontinuous method. The surface microhardness, crystal structure and microstructure are measured by microhardness measurement, XRD, SEM and AES. The process is applied to industrial cutting tools in the production line, and the results are reported in this paper.
Keywords :
Auger electron spectra; X-ray diffraction; aluminium; corrosion protective coatings; crystal microstructure; crystal structure; cutting tools; electrochemical impedance spectroscopy; high-temperature effects; microhardness; nitrogen; oxidation; plasma immersion ion implantation; scanning electron microscopy; surface hardening; thin films; titanium compounds; vapour deposited coatings; wear resistant coatings; 300 to 600 degC; 800 degC; AES; Auger electron spectroscopy; NaCl solution; SEM; TiN films; TiN:Al; TiN:N; X-ray diffraction; XRD; corrosion resistance; crystal structure; electrochemical impedance spectroscopy; high temperature aluminum ion implantation; high temperature nitrogen ion implantation; high temperature oxidation wear resistance; industrial cutting tools; macroparticles; microstructure; multifunction ion implantation; plasma implantation; plasma nitriding; scanning electron microscopy; shutter plate; surface microhardness; titanium nitride coated carbide cutting tools; vacuum arc ion plating; Aluminum; Cutting tools; Electrical resistance measurement; Ion implantation; Nitrogen; Oxidation; Plasma immersion ion implantation; Plasma temperature; Surface resistance; Titanium;
Conference_Titel :
Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. The 31st IEEE International Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-8334-6
DOI :
10.1109/PLASMA.2004.1340074