Title :
Electrical characterization of novel material for high-density capacitors
Author :
Wenbin Chen ; Miao Cai ; Ming Gong ; Bingbing Zhang ; Yu Yang ; Zhen Zhang ; Kailin Pan ; Daoguo Yang
Author_Institution :
Guangxi Key Lab. of Manuf. Syst. & Adv. Manuf. Technol., Guilin Univ. of Electron. Technol., Guilin, China
Abstract :
This paper presents the investigation for the electrical characterization of PMNT (lead magnesium niobate - lead titanate) thin-films with different fabrication parameters. The PMNT thin-films are processed under different conditions. Electrical characterization results including capacitance-voltage (C-V) measurements at different voltages and frequencies are presented.
Keywords :
capacitors; lead compounds; semiconductor device models; semiconductor thin films; C-V measurement; PMNT thin film; capacitance-voltage measurement; electrical characterization; high-density capacitor; lead magnesium niobate; lead titanate; Abstracts; Annealing; Capacitance; Capacitors; Frequency measurement; Insulators; Metals;
Conference_Titel :
Electronic Packaging Technology and High Density Packaging (ICEPT-HDP), 2012 13th International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4673-1682-8
Electronic_ISBN :
978-1-4673-1680-4
DOI :
10.1109/ICEPT-HDP.2012.6474925
