• DocumentCode
    3509272
  • Title

    An anti-snapback circuit technique for inhibiting parasitic bipolar conduction during EOS/ESD events

  • Author

    Smith, Jeremy C.

  • Author_Institution
    Somerset Design Center, Motorola Inc., Austin, TX, USA
  • fYear
    1999
  • fDate
    28-30 Sept. 1999
  • Firstpage
    62
  • Lastpage
    69
  • Abstract
    In this work, an anti-snapback circuit technique called source injection (SI) is presented for the first time, which is shown to inhibit parasitic bipolar conduction during EOS/ESD events. The design is presented for a fully salicided, 0.25 /spl mu/m, 35 /spl Aring//70 /spl Aring/ dual gate oxide, thin-epi, retrograde n-well, bulk CMOS technology. The technique is shown to greatly extend the snapback voltage of NMOS devices in this technology, which are usually destroyed instantaneously once snapback occurs. The design also has the benefit of controlling output buffer impedances for impedance matching to transmission-line loads. The design is fully compatible with the baseline process and has been shown to increase ESD robustness for positive discharge stress modes, which are the most difficult to protect for in epi processes. An increase of >1.5 kV is demonstrated for HBM, an increase of 550 V is shown for MM, and an increase of >550 V is exhibited for CDM, over nonSI and SI I/O pad designs, respectively.
  • Keywords
    CMOS integrated circuits; buffer circuits; dielectric thin films; electrostatic discharge; impedance matching; integrated circuit design; integrated circuit interconnections; integrated circuit metallisation; integrated circuit reliability; protection; semiconductor epitaxial layers; 0.25 micron; 35 angstrom; 70 angstrom; CDM voltage; CMOS technology; EOS events; ESD events; ESD robustness; HBM voltage; I/O pad design; MM voltage; NMOS devices; anti-snapback circuit technique; baseline process; epi processes; impedance matching; output buffer impedance control; parasitic bipolar conduction; positive discharge stress modes; salicided dual gate oxide bulk CMOS technology; snapback voltage; source injection; thin-epi retrograde n-well bulk CMOS technology; transmission-line loads; CMOS technology; Circuits; Earth Observing System; Electrostatic discharge; Impedance; MOS devices; Robustness; Stress; Transmission lines; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1999
  • Conference_Location
    Orlando, FL, USA
  • Print_ISBN
    1-58637-007-X
  • Type

    conf

  • DOI
    10.1109/EOSESD.1999.818991
  • Filename
    818991