DocumentCode
3509272
Title
An anti-snapback circuit technique for inhibiting parasitic bipolar conduction during EOS/ESD events
Author
Smith, Jeremy C.
Author_Institution
Somerset Design Center, Motorola Inc., Austin, TX, USA
fYear
1999
fDate
28-30 Sept. 1999
Firstpage
62
Lastpage
69
Abstract
In this work, an anti-snapback circuit technique called source injection (SI) is presented for the first time, which is shown to inhibit parasitic bipolar conduction during EOS/ESD events. The design is presented for a fully salicided, 0.25 /spl mu/m, 35 /spl Aring//70 /spl Aring/ dual gate oxide, thin-epi, retrograde n-well, bulk CMOS technology. The technique is shown to greatly extend the snapback voltage of NMOS devices in this technology, which are usually destroyed instantaneously once snapback occurs. The design also has the benefit of controlling output buffer impedances for impedance matching to transmission-line loads. The design is fully compatible with the baseline process and has been shown to increase ESD robustness for positive discharge stress modes, which are the most difficult to protect for in epi processes. An increase of >1.5 kV is demonstrated for HBM, an increase of 550 V is shown for MM, and an increase of >550 V is exhibited for CDM, over nonSI and SI I/O pad designs, respectively.
Keywords
CMOS integrated circuits; buffer circuits; dielectric thin films; electrostatic discharge; impedance matching; integrated circuit design; integrated circuit interconnections; integrated circuit metallisation; integrated circuit reliability; protection; semiconductor epitaxial layers; 0.25 micron; 35 angstrom; 70 angstrom; CDM voltage; CMOS technology; EOS events; ESD events; ESD robustness; HBM voltage; I/O pad design; MM voltage; NMOS devices; anti-snapback circuit technique; baseline process; epi processes; impedance matching; output buffer impedance control; parasitic bipolar conduction; positive discharge stress modes; salicided dual gate oxide bulk CMOS technology; snapback voltage; source injection; thin-epi retrograde n-well bulk CMOS technology; transmission-line loads; CMOS technology; Circuits; Earth Observing System; Electrostatic discharge; Impedance; MOS devices; Robustness; Stress; Transmission lines; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1999
Conference_Location
Orlando, FL, USA
Print_ISBN
1-58637-007-X
Type
conf
DOI
10.1109/EOSESD.1999.818991
Filename
818991
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