Title :
Test methodologies for detecting ESD events in automated processing equipment
Author :
Steinman, A. ; Bernier, J. ; Boehm, D. ; Albano, T. ; Tan, W. ; Pritchard, D.
Author_Institution :
Ion Syst., Berkeley, CA, USA
Abstract :
ESD events cause device damage and equipment malfunctions in automated processing equipment. This paper surveys the problems caused by static charge in automated processing equipment. It looks at a number of test methods that detect those charges and the ESD events that occur in this equipment. It also provides examples of using these techniques to solve factory problems.
Keywords :
computer integrated manufacturing; electronic equipment manufacture; electronic equipment testing; electrostatic discharge; production testing; ESD event detection; ESD events; automated processing equipment; charge detection; device damage; equipment malfunction; static charge; test methodologies; test methods; Automatic control; Automatic testing; Circuit testing; Electromagnetic interference; Electronic equipment manufacture; Electrostatic discharge; Electrostatic interference; Event detection; Production facilities; Voltage;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1999
Conference_Location :
Orlando, FL, USA
Print_ISBN :
1-58637-007-X
DOI :
10.1109/EOSESD.1999.819003
