Title :
Issues concerning CDM ESD verification modules-the need to move to alumina
Author :
Henry, Leo G. ; Kelly, Mark A. ; Diep, Tom ; Barth, Jon
Author_Institution :
ORYX Instrum. Corp., Fremont, CA, USA
Abstract :
In this work, we demonstrate that both capacitance and inductance must be the central parameters associated with the charged device model (CDM) waveform verification modules. We also propose a change from the previously used FR-4 dielectric material substrate to a more stable alumina. This improves waveform repeatability and will lead to better correlation of test results. This paper completes the groundwork for a full ESDA CDM device testing standard.
Keywords :
alumina; capacitance; electrostatic discharge; inductance; integrated circuit testing; standards; Al/sub 2/O/sub 3/; CDM ESD verification modules; ESDA CDM device testing standard; FR-4 dielectric material substrate; alumina; alumina dielectric material substrate; capacitance; charged device model; charged device model waveform verification modules; inductance; test result correlation; waveform repeatability; Capacitance; Current measurement; Dielectric materials; Electronic mail; Electrostatic discharge; Etching; Inductance; Instruments; Nickel; Testing;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1999
Conference_Location :
Orlando, FL, USA
Print_ISBN :
1-58637-007-X
DOI :
10.1109/EOSESD.1999.819006
