Title :
Integrated relative humidity sensor
Author :
Silverthorne, S.V. ; Watson, C.W. ; Baxter, R.D.
Author_Institution :
Leeds & Northrup Co., North Wales, PA, USA
Abstract :
The sensor described combines a polymer-based capacitive humidity sensor on the same chip with CMOS electronics. The resulting three-lead integrated sensor provides a DC output voltage which varies linearly with relative humidity. Thus, the sensor is readily adapted to conventional 4-20-mA control loops. Its low power consumption ( approximately 1 mW at 5 V) makes it useful for battery operation and the DC output eliminates the need for shielded cable and special connectors in applications requiring the sensor to be located remote from auxiliary electronics.<>
Keywords :
CMOS integrated circuits; electric sensing devices; humidity measurement; 1 mW; 4 to 20 mA; 5 V; CMOS; DC output voltage; battery operation; capacitive humidity sensor; relative humidity sensor; three-lead integrated sensor; Capacitive sensors; Electrodes; Humidity measurement; Integrated circuit measurements; Polymers; Semiconductor device measurement; Sensor phenomena and characterization; Switched capacitor circuits; Switching circuits; Voltage;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1988.26435
