Integrated relative humidity sensor

Author

Silverthorne, S.V. ; Watson, C.W. ; Baxter, R.D.

Author_Institution

Leeds & Northrup Co., North Wales, PA, USA

fYear

1988

fDate

6-9 June 1988

Firstpage

67

Lastpage

71

Abstract

The sensor described combines a polymer-based capacitive humidity sensor on the same chip with CMOS electronics. The resulting three-lead integrated sensor provides a DC output voltage which varies linearly with relative humidity. Thus, the sensor is readily adapted to conventional 4-20-mA control loops. Its low power consumption ( approximately 1 mW at 5 V) makes it useful for battery operation and the DC output eliminates the need for shielded cable and special connectors in applications requiring the sensor to be located remote from auxiliary electronics.<>

Keywords

CMOS integrated circuits; electric sensing devices; humidity measurement; 1 mW; 4 to 20 mA; 5 V; CMOS; DC output voltage; battery operation; capacitive humidity sensor; relative humidity sensor; three-lead integrated sensor; Capacitive sensors; Electrodes; Humidity measurement; Integrated circuit measurements; Polymers; Semiconductor device measurement; Sensor phenomena and characterization; Switched capacitor circuits; Switching circuits; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE

Conference_Location

Hilton Head Island, SC, USA

Type

conf

DOI

10.1109/SOLSEN.1988.26435

Filename

26435