Title :
Proceedings 1996 IEEE Hong Kong Electron Devices Meeting
Abstract :
The following topics were dealt with: sensor technology; thin film processing; silicon devices-SOI devices, SOI, device simulation and reliability; compound semiconductors
Keywords :
semiconductor devices; SOI; SOI devices; compound semiconductors; device simulation; electron devices; reliability; sensor technology; silicon devices; thin film processing;
Conference_Titel :
Electron Devices Meeting, 1996., IEEE Hong Kong
Conference_Location :
Hong Kong
Print_ISBN :
0-7803-3091-9
DOI :
10.1109/HKEDM.1996.566291
