Microwave analysis of a MEMS switch

This paper demonstrates Radio Frequency (RF) performances of a proposed and designed two hot arms actuator MEMS switch. The switch is designed and simulated using CST Microwave Studio. AWR Microwave Office has been used to obtain different parameters of transmission line. The simulated results show that the designed MEMS switch performs well at high frequency. At OFF state the return loss S₁₁ drops nearly to zero dB and the isolation S₂₁ become lower than -50 dB at 1 GHz and -35 dB at 10 GHz which indicates the high isolation. At ON state position the simulation exhibits very low insertion loss, S₂₁ <; -0.16 dB at 10 GHz and return loss S₁₁ <;-19 dB at 10 GHz. Even at more high frequency insertion loss is very low as S₂₁ <; -0.22 dB and return loss S₁₁ <; -18 dB at 39.5 GHz.