Title :
A design and production framework for modular microsystems
Author :
Grosser, Volker ; Michel, Bruno ; Reichl, Herbert
Author_Institution :
Fraunhofer Inst. for Reliability & Microintegration, Berlin
Abstract :
The trend to higher integration in microelectronics and the integration of micromechanical, microfluidic and microoptical components require new packaging solutions. A highly flexible design and production framework for microsystems, suitable for mid-scale production at reasonable costs, was developed
Keywords :
economics; micromachining; micromechanical devices; modules; packaging; costs; integration; microelectronics; microfluidic components; micromechanical components; microoptical components; mid-scale production; modular microsystems; packaging; standardisation; Assembly; Control systems; Design engineering; Fabrication; Intelligent sensors; Manufacturing automation; Packaging; Production; Reliability engineering; Standardization;
Conference_Titel :
Micromechatronics and Human Science, 1999. MHS '99. Proceedings of 1999 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5790-6
DOI :
10.1109/MHS.1999.820005
