An optimized frequency of dielectric barrier discharge analyzed by difference of voltage and current

Summary form only given. In this paper, we configured the open type DBD (dielectric barrier discharge) system. Discharge character was remained as a stable feature and its properties were successfully investigated. Power absorption was measured as product of voltage and current as a function of frequency under open-air atmosphere. We observed the existence of an optimum frequency for power absorption. It is suggested that the optimum frequency occurs because the phase difference between voltage and current decreases as frequency increases. Helium addition to O/sub 2/-discharge under open-air condition shows OES intensity changes as He flow rate. This means that generation rate of radical may change according to the gas species although inert gas is added. Physical meaning of the area of current and voltage trajectory on 1-V plain is supposed to reactive part. To increase the power efficiency, we should reduce the area, i.e. the phase difference of voltage and current. Contact angle is measured on PR (photoresist) surface after some treatment conditions. Helium addition on the main O/sub 2/-discharge results in the increase of contact angle. It means that the He addition changes the radicals generated from oxygen and affects the surface of PR.