Title :
The measurement of ion flow velocity by Mach probes in unmagnetized plasmas
Author :
Eunsuk Ko ; Xu Wang ; Hershkowitz, Noah
Author_Institution :
Dept. of Eng. Phys., Univ. of Wisconsin, Madison, WI, USA
Abstract :
Summary form only given. The measurement of ion flow in unmagnetized plasmas is performed using two Mach probes, one is a planar Mach probe and the other is spherical. The planar Mach probe consists of two single sided planar Langmuir probes back to back with an insulator between them. The spherical Mach probe, which was inspired by Hutchinson´s numerical calculation, consists of a conducting sphere that has two conducting probe tips, insulated from the sphere and mounted at /spl theta/=0/spl deg/ and 180/spl deg/ with respect to the flow direction. The experiments are performed in a double-plasma device for ion flow velocity v/sub f/ up to 4.5 c/sub s/, where c/sub s/ is the sound speed, and along a presheath in a multi-dipole DC plasma for v/sub f/ < 1.0 c/sub s/ with Argon pressure ranging from 0.1 to 1 mTorr and plasma density range of 10/sup 7//spl sim/10/sup 10/ cm/sup -3/. The laboratory plasma in the, presheath was limited to T/sub i/, <0.1 T/sub e/ and v/sub f//spl les/1.0 c/sub s/. The measured super-sonic ion flow velocities are compared to the velocity from ion energy using an ion energy analyzer and single sided probes.
Keywords :
Langmuir probes; argon; plasma density; plasma devices; plasma flow; plasma pressure; plasma sheaths; 0.1 to 1 mtorr; Hutchinson numerical calculation; argon pressure; double-plasma device; ion energy analyzer; ion flow velocity measurement; multidipole DC plasma; planar Langmuir probes; planar Mach probe; plasma density; plasma sheath; single sided probes; spherical Mach probe; super-sonic ion flow velocities; unmagnetized plasmas; Argon; Fluid flow measurement; Insulation; Laboratories; Performance evaluation; Plasma density; Plasma devices; Plasma measurements; Probes; Velocity measurement;
Conference_Titel :
Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. The 31st IEEE International Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-8334-6
DOI :
10.1109/PLASMA.2004.1340164