Domain decomposition approach for capacitance computation of non-orthogonal interconnect structures

In this paper, we apply the domain decomposition approach in conjunction with the finite difference (FD) method to compute, efficiently, the capacitance matrices of crossovers and via type interconnect structures formed by traces that are nonorthogonal in general. In the past, we have applied the FD method in conjunction with the perfectly matched layer (PML) and the impedance boundary condition for FD mesh truncation, to compute the capacitances of orthogonal interconnect configurations. In this work, we extend the above approach to apply to more general geometries, e.g. vias and crossovers with arbitrary angles. The paper presents some representative numerical results and examines the convergence and efficiency issues of the proposed algorithm