Title :
An advanced solid state pressure transducer for high reliability SSME applications
Author :
Gustafson, G.E. ; Shea, J.J.
Author_Institution :
Honeywell Inc., Plymouth, MN, USA
Abstract :
The objective of this research project was to develop a silicon sensor and packaging technique to advance the state-of-the-art of pressure transducers for the NASA Space Shuttle main engine (SSME). This advancement is expected to yield improved reliability, accuracy, and cryogenic temperature operation. The author describes the silicon sensor, packaging concept, and the results from mechanical and electrical testing of development hardware.<>
Keywords :
aerospace engines; electric sensing devices; elemental semiconductors; packaging; pressure transducers; semiconductor technology; silicon; NASA Space Shuttle main engine; Si; accuracy; aerospace engine; cryogenic temperature operation; electrical testing; mechanical testing; packaging; pressure transducers; reliability; Cryogenics; Engines; Mechanical sensors; NASA; Packaging; Silicon; Solid state circuits; Space shuttles; Temperature sensors; Transducers;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1988.26454
