Universal pressure and temperature SAW sensor for wireless applications

Author

Buff, W. ; Rusko, M. ; Goroll, M. ; Ehrenpfordt, J. ; Vandahl, T.

Author_Institution

Inst. of Solid State Electron., Tech. Univ. Ilmenau, Germany

Volume

1

fYear

1997

fDate

5-8 Oct 1997

Firstpage

359

Abstract

This work presents a universal SAW sensor device for measurement of either pressure or temperature or both simultaneously. An arrangement of three surface acoustic wave resonators (SAWRs) was used. The experimental sensor described in this paper employs a 35° Y cut quartz diaphragm and utilizes center frequencies ranging from 433 to 436 MHz. The sensor relies on differences in the dependence of each SAWR center frequency on pressure and temperature. A difference frequency measurement was used. The difference frequency outputs were used to determine pressure and temperature

Keywords

pressure sensors; surface acoustic wave resonators; surface acoustic wave sensors; telemetry; temperature sensors; 433 to 436 MHz; Y cut quartz diaphragm; difference frequency measurement; passive remote sensing; passive wireless telemetry systems; pressure sensor; simultaneous measurement; surface acoustic wave resonators; temperature sensor; universal SAW sensor device; wireless applications; Acoustic measurements; Acoustic sensors; Acoustic waves; Frequency; Pressure measurement; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.663039

Filename

663039