Developing a fuzzy controller for a helicon plasma source

Author

Lund, T. ; Cheetham, A.D. ; Rayner, J.P. ; Zhang, S.

Author_Institution

Plasma Instrum. Lab., Canberra Univ., ACT, Australia

fYear

1999

fDate

36495

Firstpage

316

Lastpage

319

Abstract

A distributed data acquisition and control system for a helicon plasma source is being developed, making use of microcontrollers linked by the IEEE-488 bus (GPIB) to a central supervisory computer. These microcontrollers enable us to construct intelligent instruments and actuators, one of which is described in this paper. This device makes use of fuzzy logic to control the tuning capacitors in an RF power matching circuit, and will soon control the whole process of coupling RF power into the circuit

Keywords

SCADA systems; capacitors; circuit tuning; computerised instrumentation; distributed control; distributed processing; fuzzy control; helicons; intelligent actuators; intelligent control; microcontrollers; peripheral interfaces; physical instrumentation control; plasma production; power electronics; solid-state plasma; GPIB; IEEE-488 bus; RF power coupling; RF power matching circuit; central supervisory computer; distributed control system; distributed data acquisition system; fuzzy controller; fuzzy logic; helicon plasma source; intelligent actuators; intelligent instruments; microcontrollers; tuning capacitors; Centralized control; Circuits; Control systems; Distributed computing; Fuzzy control; Intelligent actuators; Microcontrollers; Plasma sources; Radio frequency; SCADA systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Knowledge-Based Intelligent Information Engineering Systems, 1999. Third International Conference

Conference_Location

Adelaide, SA

Print_ISBN

0-7803-5578-4

Type

conf

DOI

10.1109/KES.1999.820187

Filename

820187