Title :
The use of dARTMAP and fuzzy ARTMAP to solve the quality testing task in semiconductor industry
Author :
Sapozhnikova, E. ; Lunin, V. ; Ludwig, L. ; Rosenstiel, W.
Author_Institution :
Moscow Power Eng. Inst., Russia
Abstract :
Research into the application of distributed ARTMAP (dARTMAP) and fuzzy ARTMAP neural networks to quality testing is presented. The aim of this work is the classification of faulty wafers into one of 22 known classes based on topological information extracted from the geometric allocation of the defective chips on the wafer. The classification abilities of dARTMAP and fuzzy ARTMAP were investigated in comparison with the results for counterpropagation networks (CPN). Experimental results show that ART algorithms can be successfully applied to solve this problem. Both of the ART networks classify significantly better than CPN networks
Keywords :
ART neural nets; backpropagation; circuit analysis computing; fuzzy neural nets; geometry; integrated circuit testing; pattern classification; printed circuit testing; quality control; ART algorithms; adaptive resonance theory; classification abilities; counterpropagation networks; dARTMAP; defective chips; distributed ARTMAP; faulty wafer classification; fuzzy ARTMAP; geometric allocation; neural networks; quality testing; semiconductor industry; topological information extraction; Artificial neural networks; Circuit testing; Education; Electronics industry; Fuzzy neural networks; Printed circuits; Prototypes; Resonance; Semiconductor device testing; Subspace constraints;
Conference_Titel :
Knowledge-Based Intelligent Information Engineering Systems, 1999. Third International Conference
Conference_Location :
Adelaide, SA
Print_ISBN :
0-7803-5578-4
DOI :
10.1109/KES.1999.820198
