Title :
Toward a novel planar circuit compatible silicon micromachined waveguide
Author :
Becker, James P. ; Katehi, Linda P B
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
A novel, completely packaged planar-fed silicon micromachined waveguide/resonator is proposed. Simulated results for a Ka-band resonator are given, along with initial results of the required three-dimensional photolithographic patterning along sloping sidewalls
Keywords :
cavity resonators; elemental semiconductors; micromachining; photolithography; semiconductor device packaging; silicon; waveguide transitions; waveguides; 3D photolithographic patterning; Ka-band resonator; Si; packaged planar-fed silicon micromachined waveguide/resonator; planar circuit compatible silicon micromachined waveguide; simulation; sloping sidewalls; Anisotropic magnetoresistance; Circuits; Dielectric losses; Electromagnetic waveguides; Etching; Planar transmission lines; Planar waveguides; Rectangular waveguides; Resists; Silicon;
Conference_Titel :
Electrical Performance of Electronic Packaging, 1999
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-5597-0
DOI :
10.1109/EPEP.1999.819230
