DocumentCode
3511796
Title
Positioning of large-scale high-precision viscoelastic stage based on vibration suppression PTC
Author
Saiki, Kazuaki ; Shimoyama, Takachika ; Sakata, Koichi ; Fujimoto, Hiroshi
Author_Institution
Nikon Corp., Yokohama, Japan
fYear
2009
fDate
3-5 Nov. 2009
Firstpage
3136
Lastpage
3141
Abstract
A large-scale high-precision viscoelastic stage has resonance modes in low frequency. The resonance modes are an obstruction of fast and precise positioning. In this paper, we apply vibration suppression PTC (Perfect Tracking Control) to a vertical drive of the stage. Finally, the advantages of the vibration suppression PTC (VSPTC) comparing with original PTC are verified in simulations and experiments.
Keywords
position control; precision engineering; vibration control; viscoelasticity; VSPTC; large scale high precision viscoelastic stage; precise positioning; resonance modes; vibration suppression perfect tracking control; Elasticity; Large-scale systems; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics, 2009. IECON '09. 35th Annual Conference of IEEE
Conference_Location
Porto
ISSN
1553-572X
Print_ISBN
978-1-4244-4648-3
Electronic_ISBN
1553-572X
Type
conf
DOI
10.1109/IECON.2009.5415310
Filename
5415310
Link To Document