Title :
Positioning of large-scale high-precision viscoelastic stage based on vibration suppression PTC
Author :
Saiki, Kazuaki ; Shimoyama, Takachika ; Sakata, Koichi ; Fujimoto, Hiroshi
Author_Institution :
Nikon Corp., Yokohama, Japan
Abstract :
A large-scale high-precision viscoelastic stage has resonance modes in low frequency. The resonance modes are an obstruction of fast and precise positioning. In this paper, we apply vibration suppression PTC (Perfect Tracking Control) to a vertical drive of the stage. Finally, the advantages of the vibration suppression PTC (VSPTC) comparing with original PTC are verified in simulations and experiments.
Keywords :
position control; precision engineering; vibration control; viscoelasticity; VSPTC; large scale high precision viscoelastic stage; precise positioning; resonance modes; vibration suppression perfect tracking control; Elasticity; Large-scale systems; Viscosity;
Conference_Titel :
Industrial Electronics, 2009. IECON '09. 35th Annual Conference of IEEE
Conference_Location :
Porto
Print_ISBN :
978-1-4244-4648-3
Electronic_ISBN :
1553-572X
DOI :
10.1109/IECON.2009.5415310
