Impact of pad de-embedding on the extraction of interconnect parameters

In this paper we present measurements of Cu interconnect lines using RF measurements up to 40GHz and discuss the impact of inductive discontinuities on the extraction of interconnect parameters. From measured S-parameters the extracted RLCG for Cu transmission line are found via a de-embedding technique that includes inductive discontinuities due to probe tip-to-pad and interconnect-to-probe pad discontinuities. We show the importance of the probe landing position and the network model of pad for extracting interconnect parameters from RF measurement via experiments of different probe position at frequencies above about 20GHz.