Title :
Multi-channel chemical sensor using surface acoustic wave device
Author :
Nomura, T. ; Saitoh, A. ; Furukawa, S.
Author_Institution :
Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
Multi-channel SAW chemical sensor is used as an analytical system for organic gas detection. SAW sensors show a high frequency property, and can become multi-channel devices on a substrate. The features improve sensor sensitivity and enable integration of the sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of each channel was used to make a response pattern. The response to odorant solvents showed different analyte specific patterns
Keywords :
frequency response; gas sensors; interdigital transducers; surface acoustic wave delay lines; surface acoustic wave sensors; IDT; four channel SAW delay line; frequency response; high frequency property; integration of sensor; multichannel SAW chemical sensor; odorant solvents; odour sensing; organic gas detection; piezoelectric substrate; response patter; selective organic film coated; sensor sensitivity; Acoustic sensors; Acoustic signal detection; Acoustic waves; Chemical analysis; Chemical sensors; Frequency; Sensor phenomena and characterization; Substrates; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.663053
