High-temperature characterization of SiCN ceramics for wireless passive sensing applications up to 500°C

A novel technique is presented in this paper to precisely characterize silicon carbonitride (SiCN) ceramic materials at high temperatures for wireless passive sensing applications. This technique is based on a high quality (Q) factor resonator method, which allows accurate characterization of both dielectric constant and loss tangent. SiCN ceramic materials are measured from 50°C up to 500°C. It is observed that the dielectric constant of SiCN increases from 3.71 to 3.87, corresponding to a temperature range between 50 and 500°C. This temperature-dependent dielectric constant behavior provides the basis for the development of wireless passive temperature sensors in high-temperature applications.