Title :
Reducing variability in spark assisted chemical engraving gravity feed drilling of glass
Author :
Morrison, Andrew ; Rodrigues, Luis ; Wythrich, R.
Author_Institution :
Dept. of Mech. & Ind. Eng., Concordia Univ., Montreal, QC
Abstract :
A feedback controller is applied to the SACE micro-machining process for the first time. The controller used reduced the variability of the process significantly. This is important because decreasing the variability of the process contributes to improvement in the quality of the machined holes.
Keywords :
drilling; feedback; glass; micromachining; SACE micromachining process; feedback controller; glass; spark assisted chemical engraving gravity feed drilling; Adaptive control; Chemicals; Drilling; Electrodes; Feeds; Glass; Gravity; Machining; Sparks; Voltage; Spark Assisted Chemical Engraving; control; fabrication; glass micromachinng;
Conference_Titel :
Microsystems and Nanoelectronics Research Conference, 2008. MNRC 2008. 1st
Conference_Location :
Ottawa, Ont.
Print_ISBN :
978-1-4244-2920-2
Electronic_ISBN :
978-1-4244-2921-9
DOI :
10.1109/MNRC.2008.4683403
