Title :
Numerical modeling of electrodeposition phenomena
Author :
Strusevich, Nadia ; Hughes, Michael ; Bailey, Christopher ; Djambazov, Georgi
Author_Institution :
Univ. of Greenwich, London
Abstract :
Electrodeposition is a widely used technique for the fabrication of high aspect ratio microstructure components. In recent years much research has been focused within this area with an aim to understanding the physics behind the filling of high-aspect ratio vias and trenches on PCBpsilas and in particular how they can be made without the formation of voids in the deposited material. This paper describes some of the fundamental work towards the advancement of numerical models that can predict the electrodeposition process and addresses: i) A novel technique for interface motion based on a variation of a donor-acceptor technique ii) A methodology for the investigation of stress profiles in deposits iii) The implementation of acoustic forces to generate replenishing electrolytic flow circulation in recessed features.
Keywords :
electrodeposition; numerical analysis; acoustic forces; donor-acceptor technique; electrodeposition phenomena; electrolytic flow circulation; numerical modeling; stress profiles; Computational fluid dynamics; Computational modeling; Copper; Current distribution; Fabrication; Filling; Microstructure; Numerical models; Physics; Residual stresses;
Conference_Titel :
Electronics System-Integration Technology Conference, 2008. ESTC 2008. 2nd
Conference_Location :
Greenwich
Print_ISBN :
978-1-4244-2813-7
Electronic_ISBN :
978-1-4244-2814-4
DOI :
10.1109/ESTC.2008.4684362