DocumentCode :
3515355
Title :
New UV lamp sources for thin film deposition
Author :
Boyd, I.W.
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
131
Keywords :
Bandwidth; Frequency; Gas lasers; Lamps; Laser tuning; Optical films; Optical pulses; Pulse amplifiers; Ring oscillators; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.527025
Filename :
527025
Link To Document :
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