Title : 
New UV lamp sources for thin film deposition
         
        
        
        
        
        
            Keywords : 
Bandwidth; Frequency; Gas lasers; Lamps; Laser tuning; Optical films; Optical pulses; Pulse amplifiers; Ring oscillators; Sputtering;
         
        
        
        
            Conference_Titel : 
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
         
        
            Conference_Location : 
Chiba, Japan
         
        
            Print_ISBN : 
0-7803-2400-5
         
        
        
            DOI : 
10.1109/CLEOPR.1995.527025