Title :
Effect of polarization on laser etching in microelectronics material processing
Keywords :
Etching; Frequency; Gas lasers; Lamps; Laser tuning; Materials processing; Microelectronics; Optical pulses; Polarization; Pulse amplifiers;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.527026
