Title :
MOS-16: A new method for in-fixture calibration and fixture characterization
Author :
Schramm, Marcus ; Hrobak, Michael ; Schür, Jan ; Schmidt, Lorenz-Peter ; Konrad, Michael
Author_Institution :
Dept. of Microwave Eng. & High Freq. Technol. (LHFT), Univ. Erlangen-Nuremberg, Erlangen, Germany
Abstract :
The calibration of test fixtures or the estimation of their performance are well known tasks. In the case of fixtures with variable length, there are some established methods to de-embed the DUT (Device Under Test). The calibration or evaluation of a fixture with a fixed length, like a socket or a probe-card offers less possibilities. This contribution presents a novel calibration procedure, capable of gathering not only the information required for a proper de-embedding but also for an absolute characterization of fixed length fixtures, including crosstalk. In order to achieve this, specific assumptions have to be made. These assumptions, the resulting calibration scheme as well as a first validation through a known device will be addressed together with a first discussion on error propagation.
Keywords :
calibration; crosstalk; error analysis; production testing; semiconductor device testing; DUT; device under test; error propagation; fixed length fixture; in-fixture calibration procedure; performance estimation; probe-card offer; test fixture characterization; Accuracy; Calibration; Crosstalk; Mathematical model; Scattering parameters; Sockets; Standards; 16-Term error model; Calibration; Characterization;
Conference_Titel :
Microwave Measurement Conference (ARFTG), 2011 77th ARFTG
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-61284-959-1
Electronic_ISBN :
978-1-61284-960-7
DOI :
10.1109/ARFTG77.2011.6034560