Title :
Wideband relative permittivity extraction based on CPW phase constant measurements
Author :
Arz, Uwe ; Janezic, Michael D. ; Heinrich, Wolfgang
Author_Institution :
Phys.-Tech. Bundesanstalt (PTB), Braunschweig, Germany
Abstract :
We introduce a semi-numerical method to extract the relative permittivity of typical microwave substrate materials from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. Despite its numerical nature, the method is robust and converges rapidly. We demonstrate the accuracy of the method using structures built on four different substrates in a frequency range up to 110 GHz.
Keywords :
S-parameters; convergence of numerical methods; coplanar waveguides; microwave measurement; permittivity measurement; phase measurement; CPW; convergence; coplanar waveguides; microwave substrate materials; on-wafer scattering parameter measurement; phase constant measurement; semi-numerical method; wideband relative permittivity extraction; Coplanar waveguides; Frequency measurement; Gallium arsenide; Permittivity; Permittivity measurement; Substrates;
Conference_Titel :
Microwave Measurement Conference (ARFTG), 2011 77th ARFTG
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-61284-959-1
Electronic_ISBN :
978-1-61284-960-7
DOI :
10.1109/ARFTG77.2011.6034561
