• DocumentCode
    3515736
  • Title

    Wideband relative permittivity extraction based on CPW phase constant measurements

  • Author

    Arz, Uwe ; Janezic, Michael D. ; Heinrich, Wolfgang

  • Author_Institution
    Phys.-Tech. Bundesanstalt (PTB), Braunschweig, Germany
  • fYear
    2011
  • fDate
    10-10 June 2011
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We introduce a semi-numerical method to extract the relative permittivity of typical microwave substrate materials from on-wafer scattering-parameter measurements of coplanar waveguides of different lengths. Despite its numerical nature, the method is robust and converges rapidly. We demonstrate the accuracy of the method using structures built on four different substrates in a frequency range up to 110 GHz.
  • Keywords
    S-parameters; convergence of numerical methods; coplanar waveguides; microwave measurement; permittivity measurement; phase measurement; CPW; convergence; coplanar waveguides; microwave substrate materials; on-wafer scattering parameter measurement; phase constant measurement; semi-numerical method; wideband relative permittivity extraction; Coplanar waveguides; Frequency measurement; Gallium arsenide; Permittivity; Permittivity measurement; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Measurement Conference (ARFTG), 2011 77th ARFTG
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-61284-959-1
  • Electronic_ISBN
    978-1-61284-960-7
  • Type

    conf

  • DOI
    10.1109/ARFTG77.2011.6034561
  • Filename
    6034561