Title :
Multi-frequency resonator array using laser beam twinning technique
Author :
Noge, Satoru ; Uno, Takehiko
Author_Institution :
Kanagawa Inst. of Technol., Japan
Abstract :
We have already proposed monolithic integration of resonators on an artificial twin AT-cut quartz plate. In the configuration, resonators on an AT-cut plate are elastically isolated by a line shaped x-axis inversion area prepared by an artificial twinning technique. This paper presents a new twinning technique using a laser beam and its application to fabricate a resonator array on an AT-cut plate. For example, a resonator array composed of six (2×3) resonators was fabricated on an artificial twin AT-cut quartz plate (plate size: 16×15 mm). The width of the twinning area was several times of plate thickness. It was confirmed that the resonators were almost completely isolated by the x-axis inversion area
Keywords :
crystal resonators; heat treatment; laser materials processing; quartz; twinning; ultrasonic arrays; 15 mm; 16 mm; 200 to 350 C; 300 to 900 mW; AT-cut quartz plate; SiO2; US resonators; elastic isolation; laser beam twinning technique; line shaped x-axis inversion area; local heating method; monolithic integration; multi-frequency resonator array; Chromium; Etching; Laser beam cutting; Laser beams; Monolithic integrated circuits; Optical arrays; Surface treatment; Temperature; Thermal expansion; Thermal stresses;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.840810
