ZnO Nanowire Embedded Strain Sensing Cantilever: A New Ultra-Sensitive Technology Platform

Author

Ray, Priyadip ; Rao, Valipe Ramgopal

Author_Institution

Dept. of Electr. Eng., Indian Inst. of Technol., Mumbai, Mumbai, India

Volume

22

Issue

5

fYear

2013

fDate

Oct. 2013

Firstpage

995

Lastpage

997

Abstract

A novel ultra sensitive micro-cantilever-based technology platform was developed in this letter for strain sensing applications. Sensing mechanism is based on electrical conduction through the ZnO nanowires embedded inside a SU-8 polymer cantilever beam. The lower Young´s modulus of the polymer and the higher strain sensitivity of ZnO nanowires are used to improve the performance of these micro-cantilever devices. Deflection sensitivity of this technology is measured to be 128 ppm/nm. Besides the electromechanical characterization, mechanical characterization has also been performed to measure the resonant frequency of these microcantilever devices, which is shown to be in a few tens of kilohertz range, suitable for nanomechanical sensing applications.

Keywords

Young´s modulus; beams (structures); cantilevers; electrical conductivity; electromechanical effects; micromechanical devices; nanowires; strain sensors; zinc compounds; SU-8 polymer cantilever beam; Young´s modulus; ZnO; deflection sensitivity; electrical conduction; electromechanical characterization; microcantilever devices; nanomechanical sensing applications; resonant frequency; sensing mechanism; strain sensitivity; ultra sensitive microcantilever-based technology platform; ultra-sensitive technology platform; zinc oxide nanowire embedded strain sensing cantilever; Microcantilever; ZnO nanowire; sensor;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2013.2262601

Filename

6544602