Title :
Modeling the performance of cluster-based fabs
Author :
Wood, Samuel C. ; Saraswat, Krishna C.
Author_Institution :
Center for Integrated Syst., Stanford Univ., CA, USA
Abstract :
The economic performance of cluster tools is evaluated by modeling a hypothetical cluster-based fab, where almost all of a 0.6-μm DRAM (dynamic random-access memory) process flow is performed in cluster tools. A conventional fab under the same cost constraint running the same flow is also modeled as a base for comparison. From this model, a number of inherent differences between cluster-based fabs and conventional fabs are observed and described. Monte Carlo cost-based simulations are then run on the two fabs to compare the potential cost and throughput time performance of the fabs. Results suggest that the cluster-based fab can operate at considerably reduced throughput times for a relatively small cost per wafer premium. Modeling the cluster-based fab revealed a number of fab design and management issues that are much less significant or nonexistent for conventional fabs. These issues include configuration and scheduling, lot size, and scaling the fab
Keywords :
DRAM chips; Monte Carlo methods; economics; integrated circuit manufacture; manufacturing data processing; production control; scheduling; 0.6 micron; DRAM process flow; Monte Carlo cost-based simulations; cluster tools; cluster-based fabs; configuration; economic performance; lot size; modeling; scaling; scheduling; throughput time performance; Communication standards; Costs; Manufacturing processes; Monitoring; Performance evaluation; Production; Pulp manufacturing; Random access memory; Semiconductor device manufacture; Throughput;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1991. ISMSS 1991., IEEE/SEMI International
Conference_Location :
Burlingame, CA
Print_ISBN :
0-7803-0027-0
DOI :
10.1109/ISMSS.1991.146258
