• DocumentCode
    3516492
  • Title

    UV direct-writing of metals on polyimide substrates

  • Author

    Ng, J.H.-G. ; Desmulliez, M. ; Lamponi, M. ; Moffat, B.G. ; Walker, A.C. ; McCarthy, A. ; Suyal, H. ; Prior, K.A. ; Hand, D.P.

  • Author_Institution
    Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh
  • fYear
    2008
  • fDate
    1-4 Sept. 2008
  • Firstpage
    691
  • Lastpage
    694
  • Abstract
    Copper micro-patterns have been fabricated on polyimide substrates without the use of evaporation techniques or photoresist materials. A novel easy light-directed metal patterning method has been achieved by using a photoreactive polymer reducing agent, methoxy poly(ethylene glycol) (MPEG) as a thin film coating. The interaction of UV light and MPEG in ethanol film enables the photoreduction of mobile silver ions previously incorporated within the surface-modified polyimide substrates. The silver nanoparticle patterns thus formed serve as a active catalytic seed layer for subsequent electroless copper plating. Narrow copper tracks with low resistivity close to that of bulk copper have been achieved.
  • Keywords
    copper; electroless deposition; evaporation; nanoparticles; photoresists; polymers; silver; Ag; Cu; UV direct-writing; UV light; catalytic seed layer; copper micropatterns; electroless copper plating; ethanol film; evaporation techniques; light-directed metal patterning method; methoxy poly(ethylene glycol); photoreactive polymer reducing agent; photoreduction; photoresist materials; silver ions; silver nanoparticle patterns; surface-modified polyimide substrates; thin film coating; Chemical technology; Coatings; Conductivity; Copper; Ethanol; Polyimides; Polymer films; Resists; Silver; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics System-Integration Technology Conference, 2008. ESTC 2008. 2nd
  • Conference_Location
    Greenwich
  • Print_ISBN
    978-1-4244-2813-7
  • Type

    conf

  • DOI
    10.1109/ESTC.2008.4684434
  • Filename
    4684434