Title :
Design and fabrication of SAW gas sensor with resonator structure
Author :
Lee, Hea-Min ; Han, Deuk-Young ; Ahn, Hyungkeun
Author_Institution :
Dept. of Electr., Kon-Kuk Univ., Seoul, South Korea
Abstract :
In this paper, SAW (Surface Acoustic Wave) resonator is used to detect flammable and explosive gases. SAW resonators are designed by using COM (Coupled Mode) theory and made through IC fabrication processes. The gases used in this experiment are CH4, and H 2. Substrate of SAW device is 128° X rotated LiNbO3 . Resonant frequency of resonator is designed to match at 99.8 Hz. A dual resonator oscillator circuit, composed of reference SAW resonator and sensing SAW resonator is used to compensate for the effects of temperature and humidity. Finally, device performances have been examined and proved to be in excellent agreement with theoretical predictions
Keywords :
coupled mode analysis; gas sensors; lithium compounds; surface acoustic wave resonators; surface acoustic wave sensors; 99.8 MHz; LiNbO3; SAW gas sensor; coupled mode theory; dual resonator oscillator circuit; explosive gases; flammable gases; resonant frequency; resonator structure; Acoustic signal detection; Acoustic waves; Explosives; Fabrication; Flammability; Gas detectors; Gases; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on
Conference_Location :
Seoul
Print_ISBN :
0-7803-2651-2
DOI :
10.1109/ICPADM.1997.616629
