Title :
An all-solid-state, deep-UV laser source at 193 nm
Author :
Wen-Bin Yan ; Steckroat, T.F. ; Frost, Richard A. ; Walling, J.C. ; Heller, D.F.
Author_Institution :
Light Age Inc.
Keywords :
Absorption; Crystals; Frequency; Laser tuning; Lithography; Optical harmonic generation; Optical pulses; Power lasers; Pulse generation; Pump lasers;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
DOI :
10.1109/CLEO.1997.603479
