Title :
Surface acoustic wave vapor sensor using ultrathin multilayer films
Author :
Nomura, T. ; Saitoh, A. ; Furukawa, S.
Author_Institution :
Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
A surface acoustic wave (SAW) sensor incorporating an ultrathin selective film is presented. The ultrathin films were made by both self-assembled (SA) method and by Langmuir-Blodgett (LB) method. SAW delay lines coated with SA film and LB film has been used as vapor sensor. Rapid and totally reversible sensor responses were obtained by using the thin monolayer film
Keywords :
Langmuir-Blodgett films; gas sensors; self-assembly; surface acoustic wave delay lines; surface acoustic wave sensors; Langmuir-Blodgett method; SAW delay lines; SAW vapor sensor; high sensitivity; linearity; rapid response; reversible sensor responses; self-assembled method; thin monolayer film; ultrathin multilayer films; ultrathin selective film; Acoustic sensors; Acoustic waves; Chemical sensors; Delay lines; Mechanical sensors; Optical films; Optical surface waves; Surface acoustic wave devices; Surface acoustic waves; Thin film sensors;
Conference_Titel :
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location :
Besancon
Print_ISBN :
0-7803-5400-1
DOI :
10.1109/FREQ.1999.841496
