DocumentCode :
3517452
Title :
Nonlinear spectroscopy and process monitoring of Si
Author :
Downer, M.C. ; Aktsipetrov, O.A. ; Anderson, M.H. ; ter Beek, M. ; Dadap, Jerry I. ; Ekerdt, John G. ; Hu, X.F. ; Jiang, Yizhang ; Lee, Yu Seong ; Lim, Dong-Kuk ; Lowell, J.K. ; Mishina, E.D. ; Russell, N.M. ; Wilson, P.T. ; Xu, Zongben
Author_Institution :
Center-for Synthesis, Growth and Analysis of Electronic Materials, University of Texas at Austin
Volume :
11
fYear :
1997
fDate :
18-23 May 1997
Firstpage :
487
Lastpage :
487
Keywords :
Epitaxial growth; Monitoring; Nonlinear optics; Optical harmonic generation; Optical pumping; Optical sensors; Optical surface waves; Polarization; Spectroscopy; Ultrafast optics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
Type :
conf
DOI :
10.1109/CLEO.1997.603483
Filename :
603483
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3517452
