DocumentCode :
3517583
Title :
Design and fabrication of a novel compliant rotary nanopositioning stage
Author :
Qingsong Xu
Author_Institution :
Dept. of Electromech. Eng., Univ. of Macau, Macao, China
fYear :
2013
fDate :
6-10 May 2013
Firstpage :
1415
Lastpage :
1420
Abstract :
This paper presents the design, fabrication, and testing of a compliant rotary nanopositioning stage for precision engineering applications. The major advantage of the rotary stage lies in that it possesses a large rotational range and a compact size simultaneously. A new idea of compound radial flexure is proposed to enable this merit. A novel rotary stage is designed to provide a rotary angle over 10° while delivering a negligible magnitude of center shift. In the design procedure, analytical models are established for the performance evaluation of the stage, which are validated by finite element analysis (FEA). A prototype stage of 10-cm diameter is fabricated by wire-electrical discharge machining (EDM) process for experimental tests. The stage is driven by a voice coil motor and its output motion is measured by laser displacement sensors. Both FEA and experimental results confirm the large rotational range and low level of center shift of the rotary nanopositioning system. The proposed idea can be extended to the design of other precision positioning systems with rotary motion.
Keywords :
design engineering; electrical discharge machining; finite element analysis; nanopositioning; optical sensors; EDM; FEA; analytical models; compliant rotary nanopositioning stage; compound radial flexure; design procedure; finite element analysis; laser displacement sensors; precision engineering applications; precision positioning systems; rotary angle; voice coil motor; wire-electrical discharge machining process; Analytical models; Compounds; Force; Materials; Nanopositioning; Prototypes; Sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Robotics and Automation (ICRA), 2013 IEEE International Conference on
Conference_Location :
Karlsruhe
ISSN :
1050-4729
Print_ISBN :
978-1-4673-5641-1
Type :
conf
DOI :
10.1109/ICRA.2013.6630756
Filename :
6630756
Link To Document :
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