• DocumentCode
    3517892
  • Title

    Noise characteristics of cold emission cathodes

  • Author

    Andreev, A. ; Knapek, A. ; Grmela, L. ; Sik, O.

  • Author_Institution
    Brno Univ. of Technol., Brno, Czech Republic
  • fYear
    2010
  • fDate
    12-16 May 2010
  • Firstpage
    7
  • Lastpage
    9
  • Abstract
    The paper presents the noise characteristics of microscopic cathode based on Schottky field emission. Schottky emission is considered to be the predominant electron source technology in actual focused electron beam equipment. For the ideal electron source, it is necessary to achieve following properties: small source size, low electron emission energy spread, angular intensity (an emission current per unit solid angle), low noise, long-term stability and a simple and low-cost operation. The noise spectroscopy in time and frequency domain is based on measuring cathode´s voltage noise density in ultra-high vacuum conditions (UHV) in order to avoid environment interaction with ions which are present in the vacuum chamber. The first part of the article describes basic concept of electronic noise together with the description of used cathodes. Second part focuses on the method of measurement and in the last part, reached results are presented together with suitable explanation according to the concept of electronic noise.
  • Keywords
    1/f noise; cathodes; electron field emission; focused ion beam technology; 1/f noise; Schottky field emission; angular intensity; cathode voltage noise density; cold emission cathodes; electron source technology; electronic noise; focused electron beam equipment; frequency domain; generation-recombination noise; low electron emission energy; microscopic cathode; noise characteristics; noise spectroscopy; ultrahigh vacuum conditions; vacuum chamber; Cathodes; Etching; Noise; Noise measurement; Springs; Voltage measurement; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Technology (ISSE), 2010 33rd International Spring Seminar on
  • Conference_Location
    Warsaw
  • Print_ISBN
    978-1-4244-7849-1
  • Electronic_ISBN
    978-1-4244-7850-7
  • Type

    conf

  • DOI
    10.1109/ISSE.2010.5547246
  • Filename
    5547246