Planar processed APDs and APD arrays for scintillation detection

Author

Shah, K.S. ; Farrell, R. ; Grazioso, R.F. ; Cirignano, L. ; Squillante, M.R. ; Entine, G.

Author_Institution

RMD Inc., Watertown, MA, USA

Volume

1

fYear

1999

fDate

1999

Firstpage

56

Abstract

In this paper, performance characteristics of new, planar processed silicon avalanche photodiodes (APD) and arrays are discussed for scintillation spectroscopy as well as direct X-ray detection. We have successfully fabricated large area APDs with sizes ranging from 1 cm² to 13 cm² using a novel planar process. The devices have shown very high gain (10⁴), low noise (<1 keV for 1 cm² size) and high quantum efficiency (>60% for λ>400 nm). Direct X-ray detection has been achieved with high energy resolution (1.5 keV FWHM for 5.9 keV X-rays for 1 cm² size) at room temperature

Keywords

X-ray detection; X-ray spectroscopy; avalanche photodiodes; silicon radiation detectors; solid scintillation detectors; 293 K; 5.9 keV; 662 keV; APD arrays; Si; Si avalanche photodiodes; X-ray detection; large area APD; performance characteristics; planar processed APD; room temperature; scintillation detection; scintillation spectroscopy; Avalanche photodiodes; Electrons; Energy resolution; Fabrication; Photomultipliers; Silicon; Solid scintillation detectors; Spectroscopy; Temperature; X-ray detection;

fLanguage

English

Publisher

ieee

Conference_Titel

Nuclear Science Symposium, 1999. Conference Record. 1999 IEEE

Conference_Location

Seattle, WA

ISSN

1082-3654

Print_ISBN

0-7803-5696-9

Type

conf

DOI

10.1109/NSSMIC.1999.842449

Filename

842449