Title :
Viscous damping influence on dynamic characteristics in MEMS variable capacitor
Author :
Blum, Kirill E. ; Ostertak, Dmitriy I.
Author_Institution :
SibIS LLC, Novosibirsk, Russia
fDate :
June 29 2015-July 3 2015
Abstract :
Dynamic characteristics of movable electrode in MEMS variable capacitor using ANSYS software are studied. It is discovered that significant contribution to the vibration system damping is introduced by squeeze-film damping between serpentine spring arms. It is found that the vibration amplitude is inversely proportional to the stiffness coefficient and directly proportional to the number of the arms. At the same time, the amplitude is inversely proportional to damping ratio and to the arms number too. In the studied case the elastic force is strongly suppressed by the damping force.
Keywords :
capacitors; damping; electrodes; micromechanical devices; springs (mechanical); ANSYS software; MEMS variable capacitor; arms number; damping force; damping ratio; elastic force; movable electrode; serpentine spring arms; squeeze-film damping; stiffness coefficient; vibration amplitude; vibration system damping; Capacitors; Damping; Force; Micromechanical devices; Q-factor; Springs; Vibrations; MEMS; quality factor; serpentine spring; vibration system; viscous damping;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2015 16th International Conference of Young Specialists on
Conference_Location :
Erlagol
Print_ISBN :
978-1-4673-6718-9
DOI :
10.1109/EDM.2015.7184475
