Title :
Characterization of a MEMS-Based Embedded Non Volatile Memory Array for Extreme Environments
Author :
Zambelli, Cristian ; Olivo, Piero ; Gaddi, Roberto ; Schepens, Cor ; Smith, Charles
Author_Institution :
Dipt. di Ing., Univ. di Ferrara, Ferrara, Italy
Abstract :
In this work we present a MEMS-based eNVM concept, designed for sustaining harsh environmental conditions. The endurance and the data retention features are investigated through a set of electrical characterization measurements. A guideline on the physical principles on which the memory relies is also included.
Keywords :
micromechanical devices; random-access storage; MEMS-based eNVM concept; MEMS-based embedded non volatile memory array; data retention feature; electrical characterization measurement; harsh environmental condition; Arrays; Contact resistance; Electrodes; Force; Microswitches; Nonvolatile memory;
Conference_Titel :
Memory Workshop (IMW), 2011 3rd IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4577-0225-9
Electronic_ISBN :
978-1-4577-0224-2
DOI :
10.1109/IMW.2011.5873214
