Title :
2D silicon nanopillars arrays for photonics
Author :
Golobokova, Lyudmila S. ; Nastaushev, Yuri V. ; Dultsev, Fedor N. ; Kryzhanovskaya, Natalia V.
Author_Institution :
Rzhanov Inst. of Semicond. Phys., Novosibirsk, Russia
fDate :
June 29 2015-July 3 2015
Abstract :
In this paper, particularities of ordered silicon nanopillars (Si NP) arrays formation by mean electron beam lithography and dry etching were studied. The optical and electrical properties of the Si NPs were investigated.
Keywords :
electron beam lithography; elemental semiconductors; nanophotonics; nanostructured materials; silicon; sputter etching; 2D silicon nanopillars arrays; Si; dry etching; electrical properties; electron beam lithography; optical properties; ordered silicon nanopillars arrays; photonics; Etching; Image color analysis; Nanoscale devices; Optical imaging; Passivation; Silicon; electron beam lithography; nanophotonics; silicon nanopillars;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2015 16th International Conference of Young Specialists on
Conference_Location :
Erlagol
Print_ISBN :
978-1-4673-6718-9
DOI :
10.1109/EDM.2015.7184478
