DocumentCode
3518320
Title
2D silicon nanopillars arrays for photonics
Author
Golobokova, Lyudmila S. ; Nastaushev, Yuri V. ; Dultsev, Fedor N. ; Kryzhanovskaya, Natalia V.
Author_Institution
Rzhanov Inst. of Semicond. Phys., Novosibirsk, Russia
fYear
2015
fDate
June 29 2015-July 3 2015
Firstpage
20
Lastpage
23
Abstract
In this paper, particularities of ordered silicon nanopillars (Si NP) arrays formation by mean electron beam lithography and dry etching were studied. The optical and electrical properties of the Si NPs were investigated.
Keywords
electron beam lithography; elemental semiconductors; nanophotonics; nanostructured materials; silicon; sputter etching; 2D silicon nanopillars arrays; Si; dry etching; electrical properties; electron beam lithography; optical properties; ordered silicon nanopillars arrays; photonics; Etching; Image color analysis; Nanoscale devices; Optical imaging; Passivation; Silicon; electron beam lithography; nanophotonics; silicon nanopillars;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro/Nanotechnologies and Electron Devices (EDM), 2015 16th International Conference of Young Specialists on
Conference_Location
Erlagol
ISSN
2325-4173
Print_ISBN
978-1-4673-6718-9
Type
conf
DOI
10.1109/EDM.2015.7184478
Filename
7184478
Link To Document