Title :
Calculating operating characteristics and element dimensions for electrostatic micropump with nonmechanical valves
Author :
Palagin, Maksim S. ; Berkin, Aleksandr B. ; Gluhov, Aleksandr V. ; Perov, Gennady V.
Author_Institution :
Novosibirsk Factory of Semicond. Devices with Special Design Center, Novosibirsk, Russia
fDate :
June 29 2015-July 3 2015
Abstract :
A simple method for calculating operating parameters and geometric dimensions of main elements of the electrostatic micropumps with non-mechanical valves is presented. The geometric dimensions of diffuser, pump chamber and electrostatic actuator are defined. The operating voltage and frequency of the micropump for providing flow rate 150 μl/min are calculated.
Keywords :
electrostatic actuators; microfluidics; micropumps; diffuser; electrostatic actuator; electrostatic micropumps; element dimensions; geometric dimensions; non-mechanical valves; nonmechanical valves; operating parameters; pump chamber; Electrodes; Electrostatic actuators; Electrostatics; Mathematical model; Micropumps; Resonant frequency; Valves; diffuser; electrostatic actuation; micropump; non-mechanical valves;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2015 16th International Conference of Young Specialists on
Conference_Location :
Erlagol
Print_ISBN :
978-1-4673-6718-9
DOI :
10.1109/EDM.2015.7184487
