Calculating operating characteristics and element dimensions for electrostatic micropump with nonmechanical valves

Author

Palagin, Maksim S. ; Berkin, Aleksandr B. ; Gluhov, Aleksandr V. ; Perov, Gennady V.

Author_Institution

Novosibirsk Factory of Semicond. Devices with Special Design Center, Novosibirsk, Russia

fYear

2015

fDate

June 29 2015-July 3 2015

Firstpage

56

Lastpage

60

Abstract

A simple method for calculating operating parameters and geometric dimensions of main elements of the electrostatic micropumps with non-mechanical valves is presented. The geometric dimensions of diffuser, pump chamber and electrostatic actuator are defined. The operating voltage and frequency of the micropump for providing flow rate 150 μl/min are calculated.

Keywords

electrostatic actuators; microfluidics; micropumps; diffuser; electrostatic actuator; electrostatic micropumps; element dimensions; geometric dimensions; non-mechanical valves; nonmechanical valves; operating parameters; pump chamber; Electrodes; Electrostatic actuators; Electrostatics; Mathematical model; Micropumps; Resonant frequency; Valves; diffuser; electrostatic actuation; micropump; non-mechanical valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2015 16th International Conference of Young Specialists on

Conference_Location

Erlagol

ISSN

2325-4173

Print_ISBN

978-1-4673-6718-9

Type

conf

DOI

10.1109/EDM.2015.7184487

Filename

7184487