Study on open-loop precision positioning control of a micropositioning platform using a piezoelectric actuator

Two methods were used to perform open-loop precision control aiming at the nonlinearity and hysteresis of a piezoelectric actuator used in a micropositioning platform. One is a fast voltage-displacement linearization method based on iterative learning control (ILC). The other way uses a modified Preisach model to model hysteresis. Experimental results show that the positioning accuracy of the former is better than that of the latter and both can reach accuracy of submicrometer. When control series switch, for the former, the input must return to zero or saturation control voltage, and performs the next positioning control, while the latter can realize continuous control of arbitrary series.